Blank Cover Image

KINETIC MODELING AND MEASUREMENT OF ACTIVE SPECIES DISTRIBUTIONS DURING DRY ETCHING

Author(s):
Publication title:
Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
68
Pub. Year:
1986
Page(from):
237
Page(to):
242
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837340 [0931837340]
Language:
English
Call no.:
M23500/68
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings *FACTORS AFFECTING CHARGING DAMAGE DURING PLASMA ETCHING

McVittie, J.P.

Electrochemical Society
7 Conference Proceedings Modeling of Aspect Ratio Dependent Etching in an Inductively Coupled Plasma

Han, J. S., Mcvittie, J. P.

MRS - Materials Research Society
2 Conference Proceedings Modeling of Notching Caused by Aspect Ratio Dependent Charging During High Density Plasma Etching

Hane, M., Kinoshita, T., McVittie, J.P.

Electrochemical Society
8 Conference Proceedings Device Modeling Challenges into the Next Century

Dutton, R.W.

Electrochemical Society
3 Conference Proceedings The Effect of Ion Heating on the Angular Distributions in Plasma Etching Processes

Zheng, J., McVittie, J.P.

Electrochemical Society
9 Conference Proceedings Fast imaging of a 41-cm amorphous silicon flat-panel detector for radiographic applications

Kump,K.S.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Profile Modeling of Collimated Ti Physical Vapor Deposition

Bang, D., McVittie, J.P., IslamRaja, M.M., Saraswat, K. C., Krivokapic, Z., Ramaswami, S., Cheung, R.

Electrochemical Society
10 Conference Proceedings Analysis of channeled spectropolarimetry using singular value decomposition

Sabatke,D.S., Locke,A.M., Descour,M.R., Dereniak,E.L., Garcia,J.P., Hamilton,T.K., McMillan,R.W.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings A New Probe for Direct Measurement of Surface Charging

McVittie, J.P., Murakawa, S.

Electrochemical Society
11 Conference Proceedings Snapshot imaging spectropolarimeter

Locke,A.M., Sabatke,D.S., Dereniak,E.L., Descour,M.R., Garcia,J.P., Hamilton,T.K., McMillan,R.W.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings CHARGING EFFECTS ON ION TRAJECTORIES IN PLASMA ETCHING

Murakawa, S., Fang, S., McVittie, J.P.

Electrochemical Society
12 Conference Proceedings Measurement and modeling of protoporphyrin IX photo-oxidation during superficial PDT

Robinson,D.J., Stringer,M.R., Crum,W.R., Collins,P.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12