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ELECTRON DIFFRACTION STUDY OF MULTILAYER STRUCTURES WITH PARTIALLY COHERENT ILLUMINATION

Author(s):
Publication title:
Materials problem solving with the transmission electron microscope : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
62
Pub. Year:
1986
Page(from):
65
Page(to):
72
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837272 [0931837278]
Language:
English
Call no.:
M23500/62
Type:
Conference Proceedings

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