CLEAN-ROOM AND CO2-LASER PROCESSING OF ULTRA HIGH PURITY AL2O3

CLEAN-ROOM AND CO2-LASER PROCESSING OF ULTRA HIGH PURITY AL2O3

Author(s):

Publication title:

Defect properties and processing of high-technology nonmetallic materials : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

60

Pub. Year:

1986

Page(from):

79

Page(to):

86

Pages:

8

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837258 [0931837251]

Language:

English

Call no.:

M23500/60

Type:

Conference Proceedings

Details

TDL ID:	ZA00015546
Series ID:	PA00000011
Conf. info. (Name):	Symposium on defect properties and processing of high-technology nonmetallic materials
Conf. info. (Number):	1985
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1985.12.02-1985.12.04

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