Blank Cover Image

SELF-INTERSTITIAL INJECTION EFFECTS ON CARBON DIFFUSION IN SILICON AT HIGH TEMPERATURES

Author(s):
Publication title:
Oxygen, carbon, hydrogen, and nitrogen in crystalline silicon : symposium held December 2-5, 1985, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
59
Pub. Year:
1986
Page(from):
445
Page(to):
450
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837241 [0931837243]
Language:
English
Call no.:
M23500/59
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings ENHANCED CARBON DIFFUSION IN SILICON DURING 900 C ANNEALING

Ladd, L. A., kalejs, J. P., Gosele, U.

Materials Research Society
7 Conference Proceedings Silicon Self-Interstitial Clusters

Colombo, L., Bongiorno, A., Rosati, M.

MRS - Materials Research Society
2 Conference Proceedings The Effect of Carbon/Self-Interstitial Clusters on Carbon Diffusion in Silicon Modeled by Kinetic Monte Carlo Simulations

Pinacho, Ruth, Jaraiz, Martin, Gossmann, Hans J., Gilmer, George H., Benton, Janet L., Werner, P.

Materials Research Society
8 Conference Proceedings The Migration of Carbon and Self Interstitials in Silicon

Mainwood,A.

Trans Tech Publications
3 Conference Proceedings CARBON PRECIPITATION IN CZ AND EFG SILICON

Feng, S.Q., Kalejs, J.P., Ast, D.G.

Materials Research Society
9 Conference Proceedings Interstitial Defect Reactions in Silicon

Kimerling,L.C., Asom,M.T., Benton,J.L., Drevinski,P.J., Caefer,C.E.

Trans Tech Publications
4 Conference Proceedings Diffusion of Si Self-Interstitials in the Presence of Carbon-Related Interstitial Traps

Gossman, H.-J., Stolk, P.A., Eaglehsam, D.J., Gilmer, G.H., Poate, J.M.

Electrochemical Society
10 Conference Proceedings Boron Diffusion and Silicon Self-Interstitial Recycling Between SiGeC Layers

Carroll, M.S., Sturm, J.C.

Materials Research Society
5 Conference Proceedings HYDROGEN PASSIVATION STUDIES IN DISLOCATED CZ AND FZ SILICON

Dube, C., Kalej, J.P., Rajendran, S.

Materials Research Society
11 Conference Proceedings The hydrogen-saturated self-interstitial iu silicon and germanium

Budde,M., Nielsen,B.Bech, Leary,P., Goss,J., Jones,R., Briddon,P.R., Oberg,S., Breuer,S.J.

Trans Tech Publications
6 Conference Proceedings FRACTURE BEHAVIOR OF SILICON CUT WITH A HIGH POWER LASER

Chao, C. C., Chleboski, R., Henderson, E. J., Holmes, C. K., Kalejs, J. P., Gross, T. S.

Materials Research Society
12 Technical Paper STRESS AND EFFICIENCY STUDIES IN EFG Final Report, 9 Jul. 1982 ・ 15 Jul 1986

Kalejs, J.P.

National Aeronautics and Space Administration
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12