FORMATION OF SILICIDES BY RAPID THERMAL ANNEALING OVER POLYCRYSTALLINE SILICON

FORMATION OF SILICIDES BY RAPID THERMAL ANNEALING OVER POLYCRYSTALLINE SILICON

Author(s):

Publication title:

Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

54

Pub. Year:

1985

Page(from):

753

Page(to):

760

Pages:

8

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837197 [0931837197]

Language:

English

Call no.:

M23500/54

Type:

Conference Proceedings

Details

TDL ID:	ZA00015540
Series ID:	PA00000011
Conf. info. (Name):	Symposium on thin films
Conf. info. (Number):	1985
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1985.12.02-1985.12.06

Similar Items:

1 Conference Proceedings HIGH PURITY TITANIUM SILICIDE FILMS FORMED BY SPUTTER DEPOSITION AND RAPID THERMAL ANNEALING Brat, T., Wei, J. C. S., Poole, J., Hodul, D., Parikh, N., Wickersham Jr., C. Materials Research Society	7 Conference Proceedings EPITAXIAL FORMATION OF RARE-EARTH SILICIDES BY RAPID ANNEALING Knapp, J.A., Picraux, S.T. Materials Research Society
2 Conference Proceedings *THE ROLE OF TRAPPED INTERSTITIALS DURING RAPID THERMAL ANNEALING Pennycook, S.J., Culbertson, R.J. Materials Research Society	8 Conference Proceedings CHARACTERIZATION AND EVOLUTION OF MICROSTRUCTURES FORMED BY HIGH DOSE OXYGEN IMPLANTATION OF SILICON El-Ghor, M.K., Pennycook, S.J., Sjoreen, T.P., Narayan, J. Materials Research Society
3 Conference Proceedings COHERENT PRECIPITATE FORMATION IN PULSED-LASER AND THERMALLY ANNEALED, ION-IMPLANTED Si Appleton, B. R.., Narayan, J., Holland,. O, W.,, Pennycook, S. J. North-Holland	9 Conference Proceedings INFLUENCE OF OXYGEN ON THE IRIDIUM SILICIDE FORMATION BY RAPID THERMAL ANNEALING Fernandez, M., Rodriguez, T., Almendra, A., Jimenez-Leube, J., Wolters, H. Materials Research Society
4 Conference Proceedings IRIDIUM SILICIDE FORMATION BY RAPID THERMAL ANNEALING Rodriguez, T., Wolters, H., Almendra, A., Sanz-Maudes, J., Da Silva, M.F., Soares, J.C. Materials Research Society	10 Conference Proceedings SILICIDE FORMATION BY RAPID THERMAL PROCESSING Chen, L. J., Lur, W., Chen, J. F., Lee, T. L., Liang, J. M. MRS - Materials Research Society
5 Conference Proceedings *SILICIDES AND RAPID THERMAL ANNEALING d’Heurle, F.M., Hodgson, R.T., Ting, C.Y. Materials Research Society	11 Conference Proceedings COMPARISON OF SILICIDE FORMATION BY RAPID THERMAL ANNEALING AND CONVENTIONAL FURNACE ANNEALING Ma, E., Natan, M., Lim B. S,, Nicolet, M-A. Materials Research Society
6 Conference Proceedings SHALLOW JUNCTION FORMATION ;IN As-IMPLANTED Si BY LOW-TEMPERATURE RAPID THERMAL ANNEALING El-Ghor, M. K., Pennycook, S. J., Zuhurm R. A. Materials Research Society	12 Conference Proceedings STABILITY OF HEAVILY DOPED Si FORMED BY As+ IMPLANTATION AND RAPID THERMAL ANNEALING Numan, M.Z., Lu, Z.H., Chu, W.K., Fathy, D., Wortman, J.J. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12