HCl OXIDATION OF HIGH DOSE ARSENIC IMPLANTED SILICON
- Author(s):
- Publication title:
- Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 54
- Pub. Year:
- 1985
- Page(from):
- 567
- Page(to):
- 572
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837197 [0931837197]
- Language:
- English
- Call no.:
- M23500/54
- Type:
- Conference Proceedings
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