COMPOUND FORMATION AND SILICON BEHAVIOR IN TITANIUM AND TANTALUM LAYERED ALUMINUM FILMS

COMPOUND FORMATION AND SILICON BEHAVIOR IN TITANIUM AND TANTALUM LAYERED ALUMINUM FILMS

Author(s):

Shen, B.W.

Publication title:

Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

54

Pub. Year:

1985

Page(from):

103

Page(to):

108

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837197 [0931837197]

Language:

English

Call no.:

M23500/54

Type:

Conference Proceedings

Details

TDL ID:	ZA00015540
Series ID:	PA00000011
Conf. info. (Name):	Symposium on thin films
Conf. info. (Number):	1985
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1985.12.02-1985.12.06

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