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A SEEDED CHANNEL APPROACH TO SILICON-ON-INSULATOR TECHNOLOGY

Author(s):
Ting, C.H.
Baerg, W.
Lin, H.Y.
Siu, B.
Hwa, T.
Sturm, J.C.
Gibbons, J.F.
2 more
Publication title:
Semiconductor-on-insulator and thin film transistor technology : symposium held December 3-6, 1985, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
53
Pub. Year:
1985
Page(from):
77
Page(to):
82
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837180 [0931837189]
Language:
English
Call no.:
M23500/53
Type:
Conference Proceedings

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