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MULTI-STEP RAPID THERMAL ANNEALING OF Si-IMPLANTED GaAs FOR MICROWAVE DISCRETE DEVICES AND MONOLITHIC INTEGRATED CIRCUITS FABRICATION

Author(s):
Yu, T-H.
Kong, W.M.
Lester, L.F.
Smith, P.M.
Duh, F.H.G.
Hwang, J.C.M.
1 more
Publication title:
Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
52
Pub. Year:
1985
Page(from):
417
Page(to):
422
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837173 [0931837170]
Language:
English
Call no.:
M23500/52
Type:
Conference Proceedings

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