Blank Cover Image

STRUCTURAL CHANGES DURING TRANSIENT POST-ANNEALING OF PREANNEALED AND ARSENIC IMPLANTED POLYCRYSTALLINE SILICON FILMS

Author(s):
Krause, S.J.
Wilson, S.R.
Gregory, R.B.
Paulson, W.M.
Leavitt, J.A.
McIntyre Jr., L.C.
Seerveld, J.L.
Stoss, P.
3 more
Publication title:
Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
52
Pub. Year:
1985
Page(from):
145
Page(to):
152
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837173 [0931837170]
Language:
English
Call no.:
M23500/52
Type:
Conference Proceedings

Similar Items:

Krause, S. J., Wilson, S. R., Paulson, W. M., Gregory, R. B.

Materials Research Society

Tonnerre, J.M., Matsuura, M., Cargill III, G.S., Hobbs, L.W.

Materials Research Society

Wilson, S.R., Paulson, W.M., Tam, G., Gregory, R.B., White, C.W., Appleton, B.R.

North Holland

Tandon, J.L., Harrison, H.B., Neoh, C.L., Short, K.T., Williams, J.S.

North-Holland

Wilson, S. R., Paulson, W. M., Varker, C. J., Lowe, A., Gregory, R. B., Reuss, R. H., Wu, S. Y., Whitfield, J. D.

North-Holland

Wilson, S. R., Gregory, R. B., Paulson, W. M., Handi, A. H., McDaniel, F. D.

North-Holland

Wilson, S.R., Gregory, R.B., Paulson, W.M.

Materials Research Society

Park, M., Krause, S.J., Wilson, S.R.

Materials Research Society

Krause, S.J., Jung, C.O., Wilson, S.R., Lorigan, R.P., Burnham, M.E.

Materials Research Society

Krause, S.J., Seraphin, S., Chen, B.L., Cordts, B., Roitman, P.

Materials Research Society

Seerveld,J.L.

SPIE-The International Society for Optical Engineering

Benton, J.L., Celler, G.K., Jacobson, D.C., Kimerling, L.C., Lischner, D.J., Miller, G.L., Robinson, Mc.D.

North Holland

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12