Blank Cover Image

TEMPERATURE DEPENDENT AMORPHIZATION OF SILICON DURING SELF IMPLANTATION

Author(s):
Publication title:
Beam-solid interactions and phase transformations : symposium held December 2-4, 1985, Boston, Massachusetts, USA
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
51
Pub. Year:
1985
Page(from):
381
Page(to):
388
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837166 [0931837162]
Language:
English
Call no.:
M23500/51
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Ge+PREAMORPHIZATION OF Si: EFFECTS OF DOSE AND VERY LOW TEMPERATURE THERMAL TREATMENT ON EXTENDED DEFECT FORMATION DURING SUBSEQUENT SPE

Myers, E., Rozgonyi, G.A., Sadana, D.K., Maszara, W., Wortman, J.J., Narayan, J.

Materials Research Society
7 Conference Proceedings Non-Contact Full Wafer Evaluation of Deep Levels in Silicon Via Temperature Dependent Surface Recombination Velocity, and Carrier Lifetime

Buczkowski, A., Rozgonyi, G.A., Shimura, F.

Electrochemical Society
2 Conference Proceedings INFLUENCE OF RAPID THERMAL ANNEALING OF SHALLOW BF2 IMPLATATION INTO PRE-AMORPHIZED SILICON

Maszara, W., Carter, C., Sadana, D. K., Liu, J., Ozguz, V., Wortman, J., Rozgonyi, G. A.

North-Holland
8 Conference Proceedings OXYGEN PRECIPITATION ALONG INDIVIDUAL ION TRACKS DURING HIGH DOSE O+ IMPLANTATION INTO SILICON

Maszara, Witold P.

Materials Research Society
3 Conference Proceedings SUPPRESSION OF SELF-INTERSTITIALS IN SILICON DURING ION IMPLANTATION VIA IN-SITU PHOTOEXCITATION

Ravi, J., Erokhin, Yu., Christensen, K., Rozgonyi, G. A., Patnaik, B. K., White, C. W.

MRS - Materials Research Society
9 Conference Proceedings Charge-State Defect Engineering of Silicon During Ion Implantation

Brown, R. A., Ravi, J., Erokhin, Y., Rozgonyi, G. A., White, C. W.

MRS - Materials Research Society
4 Conference Proceedings DYNAMIC ANNEALING PHENOMENA AND THE ORIGIN OF RTA-INDUCED “HAIRPIN" DISLOCATIONS

Maszara, W., Sadana, D. K., Rozgonyi, G. A., Sands, T., Washburn, J., Wortman, J. J.

Materials Research Society
10 Conference Proceedings Charge State Defect Engineering of Silicon During Ion Implantation

Brown, R. A., Ravi, J., Erokhin, Y., Rozgonyi, G. A., White, C. W.

MRS - Materials Research Society
5 Conference Proceedings Effect of Elevated Implant Temperature on Amorphization and Activation in As-implanted Silicon-on-insulator Layers

Katherine L. Saenger, Stephen W. Bedell, Matthew Copel, Amlan Majumdar, John A. Ott, Joel P. de Souza, Steven J. …

Materials Research Society
11 Conference Proceedings Integration Challenges for Double-Gate MOSFET Technologies

Maszara, W.P.

Materials Research Society
6 Conference Proceedings INFLUENCE OF SILICON SUBSTRATE ION IMPLANTATION ON THE SUBSEQUENT MICROSTRUCTURE EVOLUTION IN COBALT SILICIDE FILMS

Xiao, Z.G., Honeycutt, J.W., Rozgonyi, G.A.

Materials Research Society
12 Conference Proceedings Fully Silicided Metal Gates for High Performance CMOS Technology -

Maszara, W.P.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12