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PROPERTIES OF a-SiNx:H FILMS PREPARED BY GLOW DISCHARGE OF Si2H6-NH3 GAS MIXTURE

Author(s):
Kojima, Y.
Narikawa, S.
Matsuyama, T.
Imada, E.
Nojima, H.
Hayakawa, T.
Ehara, S.
2 more
Publication title:
Materials issues in applications of amorphous silicon technology : symposium held April 15-17, 1985, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
49
Pub. Year:
1985
Page(from):
203
Page(to):
208
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837142 [0931837146]
Language:
English
Call no.:
M23500/49
Type:
Conference Proceedings

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