Blank Cover Image

+*BOLTZMAN TRANSPORT EQUATION ANALYSIS OF ION IMPLANTATION RANGE AND DAMAGE DISTRIBUTIONS

Author(s):
Publication title:
Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
45
Pub. Year:
1985
Page(from):
3
Page(to):
4
Pages:
2
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837104 [0931837103]
Language:
English
Call no.:
M23500/45
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Range and Damage Distribution in Cluster Ion Implantation

Yamada, I., Matsuo, J., Jones, E. C., Takeuchi, D., Aoki, T., Goto, K., Sugii, T.

MRS - Materials Research Society
7 Conference Proceedings Range Distributions of Implanted Ions in Silicon Carbide

Janson, M.S., Linnarsson, M.K., Hallen, A., Svensson, B.G.

Trans Tech Publications
2 Conference Proceedings Modeling Silicon Implantation Damage and Transient-Enhanced Diffusion Effects for Silicon Technology Development

Giles, Martin D., Yu, Shaofeng, Kennel, Harold W., Packan, Paul A.

MRS - Materials Research Society
8 Conference Proceedings Radiation damage, range distribution, and site location measurements by channeling technique for Ar, Kr, Xe in Ni after implantation and annealing

G. D. Tolstolutskaya, I. E. Kopanetz, I. M. Neklyudov

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Analysis of implanted boron profiles across the Si-Si02 interface by secondary ion mass spectrometry

Deline, V. R., Johnson, N. M., Christel, L. A.

North-Holland
9 Conference Proceedings Analysis of Aluminum Ion Implantation Damage into 6H-SiC Epilayers

Mestres,N., Mekki,M.Ben El, Campos,F.J., Pascual,J., Morvan,E., Godignon,P., Millan,J., Lulli,G.

Trans Tech Publications
4 Conference Proceedings Calculations pertaining to Raman scattering during laser annealing of ion-implanted silicon

Wood, R.F., Lowndes, D.H., Giles, G.E.

North Holland
10 Conference Proceedings BEAM ANNEALING OF ION IMPLANTED SILICON

Gibbons F. James

Martinus Nijhoff Publishers
5 Conference Proceedings DAMAGE AND IN-SITU ANNEALING DURING ION IMPLANTATION

Sadana, D. K., Washburn, J., Byrne, P. F., Cheung, N. W.

North-Holland
11 Conference Proceedings Clinical Aspects of Orthopaedic Implant Surgery

Christel P.

Martinus Nijhoff Publishers
6 Conference Proceedings Range Distributions of Implanted Ions in Silicon Carbide

Janson, M.S., Linnarsson, M.K., Hallen, A., Svensson, B.G.

Trans Tech Publications
12 Conference Proceedings THE EFFECT OF IMPLANT SPECIES ON THE STABILITY OF ION IMPLANTATION DAMAGE

Jones, K. S., Prussin, S., Venables, D.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12