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CHARACTERIZATION OF EPITAXIAL CoSi2 FILMS GROWN ON Si

Author(s):
Publication title:
Advanced photon and particle techniques for the characterization of defects in solids : symposium held November 27-29, 1984, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
41
Pub. Year:
1985
Page(from):
355
Page(to):
362
Pages:
8
Pub. info.:
Pittsburgh: Materials Research Society
ISSN:
02729172
ISBN:
9780931837067 [0931837065]
Language:
English
Call no.:
M23500/41
Type:
Conference Proceedings

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