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TITANIUM SILICIDE FORMATION ON HEAVILY DOPED ARSENIC-IMPLANTED SILICON

Author(s):
Dowben, S. L.
Marsh, D. W.
Smith, G. A.
Lewis, N.
Chow, T. P.
Katz, W.
1 more
Publication title:
Applied materials characterization : symposium held April 15-18, 1985, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
48
Pub. Year:
1985
Page(from):
355
Page(to):
364
Pages:
10
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837135 [0931837138]
Language:
English
Call no.:
M23500/48
Type:
Conference Proceedings

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