SIMS , SAM AND RBS STUDY OF HIGH-DOSE OXYGEN IMPLANTATION INTO SILICON

SIMS , SAM AND RBS STUDY OF HIGH-DOSE OXYGEN IMPLANTATION INTO SILICON

Author(s):

Publication title:

Applied materials characterization : symposium held April 15-18, 1985, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

48

Pub. Year:

1985

Page(from):

263

Page(to):

272

Pages:

10

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837135 [0931837138]

Language:

English

Call no.:

M23500/48

Type:

Conference Proceedings

Details

TDL ID:	ZA00015531
Series ID:	PA00000011
Conf. info. (Name):	Symposium on applied materials characterization
Conf. info. (Number):	1985
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1985.04.15-1985.04.18

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