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PARAMETRIC CHARACTERIZATION OF PLASMA ETCHING PROCESSES

Author(s):
Publication title:
Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
38
Pub. Year:
1985
Page(from):
227
Page(to):
234
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837036 [0931837030]
Language:
English
Call no.:
M23500/38
Type:
Conference Proceedings

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