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EPITAXIAL GROWTH OF REFRACTORY SILICIDES ON SILICON

Author(s):
Publication title:
Layered structures, epitaxy, and interfaces : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
37
Pub. Year:
1985
Page(from):
375
Page(to):
380
Pages:
6
Pub. info.:
Pittsburgh: Materials Research Society
ISSN:
02729172
ISBN:
9780931837029 [0931837022]
Language:
English
Call no.:
M23500/37
Type:
Conference Proceedings

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