Blank Cover Image

INCOHERENT LIGHT RECRYSTALLIZATION OF SILICON-ON- INSULATOR FILMS

Author(s):
Publication title:
Comparison of thin film transistor and SOI technologies : symposium held February 1984 in Albuquerque, New Mexico, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
33
Pub. Year:
1984
Page(from):
71
Page(to):
80
Pages:
10
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444008992 [0444008993]
Language:
English
Call no.:
M23500/33
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings FACETED MELTING AND SUPERHEATING OF CRYSTALLINE Si IRRADIATED WITH INCOHERENT LIGHT

Celler, G. K., Jackson, K. A., Trimble, L. E., Robinson, McD., Lischner, D. J.

North-Holland
7 Conference Proceedings * THERMAL STRESS DURING ZONE-MELTING-RECRYSTALLIZATION OF SILICON ON INSULATOR FILMS: THE ORIGIN OF SUBBOUNDARIES AND IN-PLANE ORIENTATION OF SOI

Gibson, J.M., Pfeiffer, L.N., West, K.W., Joy, D.C.

Materials Research Society
2 Conference Proceedings Characterization of ion-implanted Si rapidly annealed with incoherent light

Benton, J.L., Celler, G.K., Jacobson, D.C., Kimerling, L.C., Lischner, D.J., Miller, G.L., Robinson, Mc.D.

North Holland
8 Conference Proceedings LINEAR ZONE-MELT RECRYSTALLIZED Si FILMS USING INCOHERENT LIGHT

Xamgar, A., Rozgonyi, G. A., Knoell, R.

North-Holland
3 Conference Proceedings Rapid large area annealing of ion-implanted Si with incoherent light

Lischner, D.J., Celler, G.K.

North Holland
9 Conference Proceedings THE EFFECT OF CHANNEL?PROTECT OXIDE ON LASER RECRYSTALLIZED SILICON?ON-INSULATOR MOS DEVICES

Sritharan, S., Collins, G.J., Fukumoto, J., Szluk, N., Jones, K.M., Al?Jassim, M.M.

Materials Research Society
4 Conference Proceedings DEFECT CONTROL DURING EPITAXIAL REGROWTH BY RAPID THERMAL ANNEALING

Baumgart, H., Celler, G. K., Lischner, D. J., Robinson, McD., Sheng, T. T.

North-Holland
10 Conference Proceedings THERMAL PROFILES IN SILICON-ON-INSULATOR (SOI) MATERIAL RECRYSTALLIZED WITH SCANNING LIGHT LINE SOURCES

Kubota, K., Hunt, C. E., Frey, J.

Materials Research Society
5 Conference Proceedings LATERAL EPITAXIAL GROWTH OF THICK POLYSILICON FILMS ON OXIDIZED 3-INCH WAFERS

Celler, G. K., Robinson, McD., Lischaer, D. J., Sheng, T. T.,

North-Holland
11 Conference Proceedings ELECTRICAL CHARACTERIZATION OF LASER/ENERGY-BEAM RECRYSTALLIZED THIN FILM SILICON-ON-INSULATOR (SOI)

Lee, E-H., Ruprecht, D. J.

North Holland
6 Conference Proceedings Silicon Epitaxy

Robinson McD.

Kluwer Academic Publishers
12 Conference Proceedings Swift Heavy Ion Induced Recrystallization Studies of Top Silicon Layer on Silicon-on-Insulator(SOI)Structure by Atomic Force Microscopy

Singh,Rajendra, Arora,S.K., Kumar,Ravi, Virdi,G.S., Ganesan,V., Avasthi,D.K., Kanjilal,D.

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12