DIELECTRIC ISOLATION USING POROUS SILICON

DIELECTRIC ISOLATION USING POROUS SILICON

Author(s):

Publication title:

Comparison of thin film transistor and SOI technologies : symposium held February 1984 in Albuquerque, New Mexico, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

33

Pub. Year:

1984

Page(from):

63

Page(to):

70

Pages:

8

Pub. info.:

New York: North Holland

ISSN:

02729172

ISBN:

9780444008992 [0444008993]

Language:

English

Call no.:

M23500/33

Type:

Conference Proceedings

Details

TDL ID:	ZA00015519
Series ID:	PA00000011
Conf. info. (Name):	Comparison of thin film transistor and SOI technologies
Conf. info. (Number):	1984
Conf. info. (Venue):	Albuquerque, New Mexico, U.S.A.
Conf. info. (Date):	1984.02.00

Similar Items:

1 Conference Proceedings Laser processing of porous silicon Baumgart, H., Frye, R.C., Trimble, L.E., Leamy, H.J., Celler, G.K. North Holland	7 Conference Proceedings Laser fabrication of silicon on dielectric substrates Leamy, H.J. North Holland
2 Conference Proceedings Defect formation in cw CO2 laser annealed silicon Baumgart, H., Phillipp, F., Leamy, H.J. North Holland	8 Conference Proceedings Structural modifications of amorphized silicon surfaces following picosecond laser irradiation Rozgonyi, G.A., Baumgart, H., Phillipp, F., Uebbing, R., Oppolzer, H. North Holland
3 Conference Proceedings THE FORMATION OF POROUS SILICON AND ITS APPLICATIONS TO DIELECTRIC ISOLATION Frye, R. C. North Holland	9 Conference Proceedings Diffusion of arsenic and phosphorus in laser-processed-polycrystalline-silicon-thin-films Baumgart, H., Leamy, H.J., Trimble, L.E., Doherty, C.J., Celler, G.K. North-Holland
4 Conference Proceedings HIGH-VOLTAGE ELECTRON MICROSCOPY INVESTIGATION OF SUBGRAIN BOUNDARIES IN RECRYSTALLIZED SILICON-ON-INSULATOR STRUCTURES Baumgart, H., Phillipp, F. Materials Research Society	10 Conference Proceedings Growth of Single Crystalline 3C-SiC and AIN on Si using Porous Si as a Compliant Seed Crystal Purser, D., Jenkins, M., Lieu, D., Vaccaro, F., Faik, A., Hasan, M. -A., Leamy, H. J., Carlin, C., Sardela, M. R. Jr., … Trans Tech Publications
5 Conference Proceedings Dislocation nucleation, growth and suppression during CW laser annealing of silicon Rozgonyi, G.A., Baumgart, H., Phillipp, F. North Holland	11 Conference Proceedings QUANTUM CONFINEMENT EFFECTS ON THE DIELECTRIC CONSTANT OF POROUS SILICON Tsu, R., Ioriatti, L., Harvey, J.F., Shen, H., Lux, R.A. Materials Research Society
6 Conference Proceedings Picosecond laser pulse induced damage in crystalline silicon Merkle, K.L., Uebbing, R.H., Baumgart, H., Phillipp, F. North Holland	12 Conference Proceedings TWIN STABILIZED PLANAR GROWTH OF SOl FILMS Baumgart, H., Phillipp, F., Ramesh, S., Khan, B., Martinez, A., Arnold, E. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12