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A Mass Spectrometric System for the Study of Transient Plasma Species in Thin Film Deposition

Author(s):
Publication title:
Plasma processing and synthesis of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
30
Pub. Year:
1984
Page(from):
277
Page(to):
282
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444008954 [0444008950]
Language:
English
Call no.:
M23500/30
Type:
Conference Proceedings

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