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SINGLE-CRYSTAL SOLUTION SILICON ETCHING CHARACTERISTICS USING EXCIMER LASER Cl2 GAS

Author(s):
Publication title:
Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
29
Pub. Year:
1984
Page(from):
167
Page(to):
172
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444008947 [0444008942]
Language:
English
Call no.:
M23500/29
Type:
Conference Proceedings

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