EXCIMER LASER-INDUCED DEPOSITION OF InP and INDIUM-OXIDE FILMS

EXCIMER LASER-INDUCED DEPOSITION OF InP and INDIUM-OXIDE FILMS

Author(s):

Publication title:

Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

29

Pub. Year:

1984

Page(from):

73

Page(to):

80

Pages:

8

Pub. info.:

New York: North-Holland

ISSN:

02729172

ISBN:

9780444008947 [0444008942]

Language:

English

Call no.:

M23500/29

Type:

Conference Proceedings

Details

TDL ID:	ZA00015513
Series ID:	PA00000011
Conf. info. (Name):	Symposium on laser-controlled chemical processing of surfaces
Conf. info. (Number):	1983
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1983.11.14-1983.11.16

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