THIN POLYMERIC FILMS PRODUCED BY ION IMPLANTATION FROM FROZEN ORGANIC MOLECULES
- Author(s):
- Publication title:
- Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 27
- Pub. Year:
- 1984
- Page(from):
- 549
- Page(to):
- 552
- Pages:
- 4
- Pub. info.:
- New York: North-Holland
- ISSN:
- 02729172
- ISBN:
- 9780444008695 [0444008691]
- Language:
- English
- Call no.:
- M23500/27
- Type:
- Conference Proceedings
Similar Items:
Materials Research Society |
7
Conference Proceedings
PHOTOLUMINESCENCE CHARACTERIZATION OF THIN SILICON-ON-INSULATOR FILMS PRODUCED BY OXYGEN IMPLANTATION
Materials Research Society |
D. Reidel |
Plenum Press |
3
Conference Proceedings
INFLUENCE OF THE IMPLANTED SPECIES ON THE RESIDUAL DAMAGE AFTER HOT IMPLANTS IN SILICON
Materials Research Society |
9
Conference Proceedings
AMORPHOUS SILICON AND SILICON-GERMANIUM THIN-FILM TRANSISTORS FORMED BY ION IMPLANTATION
Materials Research Society |
Trans Tech Publications |
MRS - Materials Research Society |
North-Holland |
SPIE - The International Society of Optical Engineering |
6
Conference Proceedings
SYNTHESIS OF HARD Si-C COMPOSITE FILMS BY ION BEAM IRRADIATION OF POLYMER FILMS
North-Holland |
12
Conference Proceedings
Growth and Characterization of Organic Polymeric Thin Films From Isopropanol by PECVD
Materials Research Society |