Blank Cover Image

Barrier properties of TaSi2 in contact with Al-metallization

Author(s):
Publication title:
Thin films and interfaces II : symposium held November 1983, in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
25
Pub. Year:
1984
Page(from):
587
Page(to):
592
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444009050 [0444009051]
Language:
English
Call no.:
M23500/25
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Interface reactions of TaSi2/Si contacts at high temperature

Oppolzer, H., Neppl, F., Hieber, K.

North-Holland
7 Conference Proceedings Stable Ti/TaSi2/Pt Ohmic Contacts On n-Type 6H-SiC Epilayer At 600℃ in Air

Okojie, Robert S., Spry, David, Krontine, Jeffery, Salupo, Carl, Wheeler, Donald R.

Materials Research Society
2 Conference Proceedings Diffusion of As, B, and P in TaSi2

Eichinger, P., Frenzel, E., Neppl, F.

North-Holland
8 Conference Proceedings Synthesis of TaSi2,MoSi2,TiSi2 in Mechanochemical Reactors Made from Relating Metals

Belyaev,E., Lomovsky,O., Goiubkova,G.

Trans Tech Publications
3 Conference Proceedings REDISTRIBUTION OF BORON IMPLANTED INTO TaSi2/POLY-Si GATES

Schwalke, U., Mazure, C., Neppl, F.

Materials Research Society
9 Conference Proceedings Composition Control of TaSi xN y Thin Films by Chemical Vapor Deposition for Future n-MOSFET Metal Gate Electrode

Y. Sugita, F. Aoyama, Y. Nara

Electrochemical Society
4 Conference Proceedings DOPANT DIFFUSION FROM TON-IMPLANTED TaSI2

Gierisch, H., Neppl, F., Frenzel, E., Eichinger, P., Hieber, K.

Materials Research Society
10 Conference Proceedings Fabrication of Nanocrystalline TaSi2-SiC Composite by High Frequency Induction Heated Combustion Synthesis and Its Mechanical Properties.

I.J. Shon, D.K. Kim, I.Y. Ko, J.K. Yoon, K.T. Hong

Trans Tech Publications
5 Conference Proceedings FAST THERMAL CYCLING AND ELECTROMIGRATION PROPERTIES OF Si/TaSi2/TiN/Al-Si MULTILAYER THIN FILM CONTACTS

Baranov, Valentin V., Ivkin, Victor M., Sakovitch, Elena L.

MRS - Materials Research Society
11 Conference Proceedings The Effects Of Nitrogen On Electrical And Structural Properties In TaSi xN y/SiO2/P-Si MOS Capacitors

Suh, You-Seok, Heuss, Greg, Lee, Jae-Hoon, Misra, Veena

Materials Research Society
6 Conference Proceedings POINT-CONTACT-SPECTROSCOPY OF VSi2, NbSi2 AND TaSi2

Gottlieb, U., Balkashin, O. P., Jansen, A. G. M., Laborde, O., Madar, R.

MRS - Materials Research Society
12 Conference Proceedings Outcome of the Antarctic CryoVEx Campaigns and First CryoSat-2 Validation Results

C. Knöfel, L. Schröder, J. Schwabe

ESA Communications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12