Blank Cover Image

ELECTRON BEAM ANNEALING OF SHALLOW BF2 IMPLANTATIONS

Author(s):
Publication title:
Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
23
Pub. Year:
1984
Page(from):
309
Page(to):
314
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444009036 [0444009035]
Language:
English
Call no.:
M23500/23
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings ELECTRON-BEAM ANNEALING OF PHOSPHORUS IMPLANTED CADMIUM TELLURIDE

Yang, C. B., Peng, M. L., Lue, J. T., Hwang, H. L.

Materials Research Society
7 Conference Proceedings Passivation of shallow acceptors in Si and GaAs by annealing in H2

Veloarisoa,I.A., Kozuch,D.M., Stavola,M., Peale,R.E., Watkins,G.D., Pearton,S.J., Abernathy,C.R., Hobson,W.S.

Trans Tech Publications
2 Conference Proceedings *HIGH TEMPERATURE ANNEALING OF SIMOX LAYERS: PHYSICAL MECHANISMS OF OXYGEN SEGREGATION

Jaussaud, C., Margail, J., Stoemenos, J., Bruel, M.

Materials Research Society
8 Conference Proceedings THE ANNEALING OF PHOSPHORUS-ION-IMPLANTED COPPER INDIUM DISULFIDE BY A PULSED ELECTRON BEAM

Lin, J.L., Ueng, H.Y., Yang, M.H., Lue, J.T., Hwang, H.L.

Materials Research Society
3 Conference Proceedings *HIGH TEMPERATURE ANNEALING OF SIMOX LAYERS PHYSICAL MECHANISMS OF OXYGEN SEGREGATION

Jaussaud, C., Margail, J., Stoemenos, J., Bruel, M.

Materials Research Society
9 Conference Proceedings ANNEALING AND DIFFUSION OF BORON IN SELF-IMPLANTED SILICON BY FURNACE AND ELECTRON BEAM HEATING

Godfrey, D. J., McMahon, R. A., Hasko, D. G., Ahmed, H., Dowsett, M. G.

Materials Research Society
4 Conference Proceedings IMPLANTATION INDUCED FILAMENTARY STRUCTURES

Jaussaud, C., Maillot, B., Bruel, M.

North-Holland
10 Conference Proceedings Multiple scanned electron beam annealing of Si implanted GaAs

Bujatti, M., Cetronio, A., Nipoti, R., Olzi, E.

North Holland
5 Conference Proceedings PROCESSING OF SHALLOW (Rp < 150 A > IMPLANTED LAYERS WITH ELECTRON BEAMS

McMillan, G. B., Shannon, J. M., Ahmed, H.

North-Holland
11 Conference Proceedings Characterization of Al-Si ohmic contacts obtained on shallow junctions by laser and electron beam annealing

Armigliato, A., De Luca, P., Finetti, M., Solmi, S.

North Holland
6 Conference Proceedings RAPID THERMAL ANNEALING OF FIB-IMPLANTED Ga SHALLOW IMPURITY PROFILES

Lin, C-M., Steckl, A. J., Chow, T. P.

Materials Research Society
12 Conference Proceedings STUDIES OF THE EFFECTS OF ION-IMPLANTATION AND ELECTRON BEAM IRRADIATION ON CuInSe2 SINGLE CRYSTALS

Mullan, C. A., Kiely, C. J., Rockett, A., Imanieh, M., Yakushev, M.V., Tomlinson, R. D.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12