RAPID ANNELING OF SILICON
- Author(s):
- Publication title:
- Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 23
- Pub. Year:
- 1984
- Page(from):
- 253
- Page(to):
- 258
- Pages:
- 6
- Pub. info.:
- New York: North-Holland
- ISSN:
- 02729172
- ISBN:
- 9780444009036 [0444009035]
- Language:
- English
- Call no.:
- M23500/23
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
A SIMPLE MODEL FOR THE TRANSIENT, ENHANCED DIFFUSION OF ION-IMPLANTED PHOSPHOROUS IN SILICON
Materials Research Society |
Materials Research Society |
North-Holland |
SPIE - The International Society of Optical Engineering |
Society of Plastics Engineers, Inc. (SPE) |
9
Conference Proceedings
A PHENOMENOLOGICAL MODEL FOR DAMAGE-ENHANCED DIFFUSION OF ION-IMPLANTED BORON IS SILICON
Electrochemical Society |
Materials Research Society |
10
Conference Proceedings
In-situ Rapid Thermal N20 Oxidation of NH3-Nitrided Si for Ultrathin Nitride/Oxide Stack Gate Formation
Electrochemical Society |
Materials Research Society |
Materials Research Society |
MRS-Materials Research Society |
Materials Research Society |