*PULSED UV EXCIMER LASER DOPING OF SEMICONDUCTORS
- Author(s):
- Deutsch, T. F.
- Publication title:
- Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 17
- Pub. Year:
- 1983
- Page(from):
- 225
- Page(to):
- 234
- Pages:
- 10
- Pub. info.:
- New York: North-Holland
- ISSN:
- 02729172
- ISBN:
- 9780444007827 [0444007822]
- Language:
- English
- Call no.:
- M23500/17
- Type:
- Conference Proceedings
Similar Items:
Materials Research Society |
7
Conference Proceedings
ABLATION OF UV-TRANSPARENT MATERIALS WITH FEMTOSECOND UV EXCIMER LASER PULSES
Materials Research Society |
Materials Research Society |
8
Conference Proceedings
Visualization of corona discharge induced by UV (248 nm) pulses of a KrF excimer laser
SPIE-The International Society for Optical Engineering |
North-Holland |
SPIE - The International Society for Optical Engineering |
4
Conference Proceedings
UV LASER-INITIATED DEPOSITION OF Al0O3 FILMS: THE EFFECT OF SURFACE IRRADIATION
North-Holland |
10
Conference Proceedings
Heavy p-type doping of ZnSe-based II-VI semiconductors using an excimer laser
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Optical characterization of binary,tertiary,and quaternary II-VI semiconductor thin films prepared by pulsed excimer laser deposition
SPIE-The International Society for Optical Engineering |