STRUCTURAL AND CHEMICAL MICROANALYSIS OF OXYGEN-BEARING PRECIPITATES IN SILICON

STRUCTURAL AND CHEMICAL MICROANALYSIS OF OXYGEN-BEARING PRECIPITATES IN SILICON

Author(s):

Carpenter, R. W.
Chan, I
Tsi, H. I ( Arizona State University, Tempe,. AZ; )
Varker, C. ( Motorola Semiconductor Research Laboratories Phoenix, AZ; )
Demer, L. J. ( Metallurgical Engineering, Dept. University of Arizona, Tusco, AZ )

Publication title:

Defects in semiconductors II : symposium held November 1982 in Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

14

Pub. Year:

1983

Page(from):

195

Page(to):

200

Pages:

6

Pub. info.:

New York: North-Holland

ISSN:

02729172

ISBN:

9780444008121 [0444008128]

Language:

English

Call no.:

M23500/14

Type:

Conference Proceedings

Details

TDL ID:	ZA00015498
Series ID:	PA00000011
Conf. info. (Name):	Symposium on defects in semiconductors
Conf. info. (Number):	2nd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1982.11.00

Similar Items:

1 Conference Proceedings DEEP LEVELS ASSOCIATED WITH OXYGEN PRECIPITATION IN CZ SILICON AND CORRELATION WITH MINORITY CARRIER LIFETIMES Chan, S.S., Varker, C. J., Whitfield, J., Carpenter, R. W. Materials Research Society	7 Conference Proceedings SCATTERING OF FREE CARRIERS BY OXYGEN PRECIPITATES IN CZOCHRALSKI-GROWN SILICON Nauka, K., Walukiewicz, W., Lagowski, J., Gatos, H. C. Materials Research Society
2 Conference Proceedings PRECIPITATE MORPHOLOGIES IN OXYGEN-ION IMPLANTED SILICON:A HIGH RESOLUTION ELECTRON MICROSCOPY STUDY. VANDERSCHAEVE,G., CARPENTER,R.W., BARRY,J.C., VARKER,C.J., WILSON,S.R. Trans Tech Publications	8 Conference Proceedings TEMPERATURE RAMPING FOR NUCLEATION OF OXYGEN PRECIPITATES IN SILICON Pinizzoto, R. F., Schaake, H. F., Massey, R. G., Heidt, D. W. Materials Research Society
3 Conference Proceedings OXYGEN PRECIPITATION IN SILICON - ITS EFFECTS ON MINORITY CARRIER RECOMBINATION AND GENERATION LIFETIME Varker, C. J., Whitfield, J. C., Fejes, P. L. North-Holland	9 Conference Proceedings Imaging, Structural and Chemical Analysis of Silicon Nanowires Barsotti, R.J., Jr., Fischer, J.E., Lee, C.H., Mahmood, J., Adu, C.K.W., Eklund, P.C. Materials Research Society
4 Conference Proceedings STEM Microanalysis of Hazed Polycrystalline Silicon Layers Carpenter, G. J. C., Houghton, D. C. North-Holland	10 Conference Proceedings Dislocation-Precipitate Interaction and Its Effect on Thermostability of Bainite in a Nb-Bearing Steel Yang, S. W., Wu, H. B., Yuan, S. Q., Shang, C. J., Wang, X. M., He, X. L. Trans Tech Publications
5 Conference Proceedings DISPLACEMENT OF ARSENIC FROM SUBSTITUTIONAL SITES IN SILICON BY MeV He+ IRRADIATION Varker, C. J., Wilson, S. R., Chan, S. S., Whitfield, J. D., Krause, S. J Materials Research Society	11 Conference Proceedings NUCLEATION AND GROWTH OF OCTAHEDRAL OXIDE PARTICLES IN SILICON: OXYGEN ION IMPLANTATION Carpenter, R.W., Vangerschaeve G., Vanker, C. J., Wilson, S.R. Materials Research Society
6 Conference Proceedings THE STRUCTURE OF OXYGEN-IMPLANTED SILICON BEFORE AND AFTER HEAT-PULSE ANNEALING Liliental-Weber, Z., Carpenter, R.W., Kelly, J.C. Materials Research Society	12 Conference Proceedings Quantum-Sized Silicon Precipitates in Silicon-Implanted and Pulse-Annealed Silicon Dioxide Films: Photoluminescence and Structural Transformations Tyschenko, I. E., Kachurin, G. A., Zhuravlev, K. S., Pazdnikov, N. A., Volodin, V. A., Gutakovsky, A. K., Leier, A. F., … MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12