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*EARLY STAGES ON OXYGEN CLUSTERING AND ITS INFLUENCE ON THE ELECTRICAL BEHAVIOR OF SILICON

Author(s):
  • Oehrlein, G. ( IBM Thomas, J. Watson Research Center,. Yorktown Height, NY; )
  • Lennart J. ( Lindstrom, Forsvarets Forskningsanstalk, Linkoping, Sweden; )
  • Corbett, J. W. ( State University of New York at Albany, Albany, NY )
Publication title:
Defects in semiconductors II : symposium held November 1982 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
14
Pub. Year:
1983
Page(from):
107
Page(to):
124
Pages:
18
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444008121 [0444008128]
Language:
English
Call no.:
M23500/14
Type:
Conference Proceedings

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