Blank Cover Image

CHRYSTALLIZATION OF AMORPHOUS SILICON FILMS BY PULSED ION BEAM ANNEALING

Author(s):
Gyulai, J.
Fastow, R.
Kavanagh, K.
Thompson, M. O.
Palmstrom, C. J.
Hewett, C. A.
Mayer, J, W,
2 more
Publication title:
Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
13
Pub. Year:
1983
Page(from):
455
Page(to):
462
Pages:
8
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444007889 [0444007881]
Language:
English
Call no.:
M23500/13
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings PULSED ION BEAM INTERFACE MELTING OF PtCr AND CrTa ALLOYS ON Si STRUCTURES

Palmstrom C. J., Fastow R.

North-Holland
7 Conference Proceedings Stability of Amorphous Silicon Thin-Film Transistors

Deane, S. C., French, I. D., Hewett, J., Powell, M. J., Wehrspohn, R. B.

Materials Research Society
2 Conference Proceedings TRANSIENT CONDUCTIVITY MEASUREMENTS IN PULSED ION BEAM MELTED SILICON

Fastow, R. M., Cyulai, J., Mayer, J. W.

North-Holland
8 Conference Proceedings ION BEAM ANALYSIS OF DIFFUSION IN POLYMER MELTS

Green, P. F., Mills, P. J., Palmstrom, C. J., Mayer, J. W., Kramer, E. J.

Materials Research Society
3 Conference Proceedings PULSED BEAMS AND ION BEAM MIXING: METAL-Si AND METAL-METAL STRUCTURES*

Mayer, J. W., Fastow, R., Galvin, G., Hung, L. S., Nastasi, M., Thompson, M. O., Zheng, L. R.

North-Holland
9 Conference Proceedings EPITAXY OF ALUMINIUM FILMS ON SEMICONDUCTORS BY IONIZED CLUSTER BEAM

Yamada, I., Palmstrom, C. J., Kennedy, E., Mayer, J. W., Inokawa, H., Tagaki, T.

Materials Research Society
4 Conference Proceedings PULSED ION BEAM ANNEALING OF NICKEL THIN FIlMS ON SILICON

Chen, L. J., Hung, L. S., Mayer, J. W., Baglin, J. E. E.

North-Holland
10 Conference Proceedings THERMAL SURFACE TREATMENT USING INTENSE, PULSED ION BEAMS

Stinnett, R. W., Buchheit, R. G., Greulich, F. A., Hills, C. R., Kilgo, A. C., McIntyre, D. C., Greenly, J. B., …

MRS - Materials Research Society
5 Conference Proceedings IMPROVED UNIFORMITY OF REACTED GaAs CONTACTS BY INTERFACE MIXING

Palmstrom, C. J., kavanagh, K. L., Hollis, M. J., Mukherjee, S. D., Mayer, J. W.

Materials Research Society
11 Conference Proceedings Transient conductance measurements during pulsed laser annealing

Thompson, M.O., Galvin, G.J., Mayer, J.W., Hammond, R.B., Paulter, N., Peercy, P.S.

North Holland
6 Conference Proceedings Substrate Heating Measurements in Pulsed Ion Beam Film Deposition

Olson, J. C., Thompson, M. O., Davis, H. A., Rej, D. J., Waganaar, W. J., Tallant, D. R.

MRS - Materials Research Society
12 Conference Proceedings MICROSTRUCTURE AND FRICTION OF ION BEAM INDUCED AMORPHOUS Ti-Pd ALLOYS

Hirvonen,J-P., Nastasi, M., Phillips, J.R., Mayer, J.W.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12