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PULSED EXCIMER LASER (308 nm) ANNEALING OF ION IMPLANTED SILICON AND SOLAR CELL FABRICATION

Author(s):
Lowndes, D. H.
Cleland, J., W.
Christie, W. H.
Eby, R. E.
Jellison Jr., G. E
Narayan, J.
Westbrook, R. D.
Wood, R. F.
Nilson, J. A.
Daas, S. C.
5 more
Publication title:
Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
13
Pub. Year:
1983
Page(from):
407
Page(to):
412
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444007889 [0444007881]
Language:
English
Call no.:
M23500/13
Type:
Conference Proceedings

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