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SOLID-PHASE-EPITAXIAL GROWTH OF ION IMPLANTED SILICON USING CW LASER AND ELECTRON BEAM ANNEALING

Author(s):
Publication title:
Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
13
Pub. Year:
1983
Page(from):
155
Page(to):
164
Pages:
10
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444007889 [0444007881]
Language:
English
Call no.:
M23500/13
Type:
Conference Proceedings

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