Blank Cover Image

Silicon Oxynitride Gate-Dielectric Made by ECR Plasma Oxynitridation

Author(s):
Manera, G. A.
Diniz, J. A.
Moshkalyov, S. A.
Lujan, G. S.
Doi, I.
Swart, J. W.
1 more
Publication title:
Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-03
Pub. Year:
2004
Page(from):
253
Page(to):
258
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774161 [1566774160]
Language:
English
Call no.:
E23400/200403
Type:
Conference Proceedings

Similar Items:

Manera, G.A., Diniz, J.A., Doi, I., Swart, J.W.

Electrochemical Society

Diniz, J.A., de Barros, L.E.M., Jr., Yoshioka, R.T., Lujan, G.S., Danilov, I., Swart, J.W.

Materials Research Society

Biasotto, C., Monte, B., Neli, R. R., Ramos, A. C. S., Diniz, J. A., Moshkalyov, S.A., Doi, I., Swart, J. W.

Electrochemical Society

Toquetti, L. Z., dos Santos Filho, S. G., Diniz, J. A., Swart, J. W.

Electrochemical Society

Diniz, J.A., Tatsch, P.J., Swart, J.

Electrochemical Society

Fioravante, N. P. Jr., Manera, L. T., Moshkalyov, S. A., Diniz, J. A., Tatsch, P. J., Grados, H. R. J., Doi, I., Swart, …

Electrochemical Society

Vieira, R., Martarello, V., Moshkalyov, S. A., Diniz, J. A., Swart, J. W.

Electrochemical Society

Daltrini, A. M., Moshkalyov, S. A., Ramos, A. C. S., Swart, J. W.

Electrochemical Society

Felicio, A.G., Diniz, J.A., Godoy Fo., J., Doi, I., Pudeozi, M.A.A., Swart, J.W.

Electrochemical Society

Reyes-Betanzo, C., Moshkalyov, S.A., Swart, J.W., Ramos, A.C.S.

Electrochemical Society

Pereira, M.A., Diniz, J.A., Doi, I., Swan, J.W.

Electrochemical Society

Mestanza, S. N. M., Rodriguez, E., Jimenez, H. G., Diniz, J. A., Doi, I., Swart, J. W.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12