Evaluation of Undercut and Applicability of a Batch HF Vapor Etching System in MEMS Release Etch Processes
- Author(s):
- Publication title:
- Microfabricated systems and MEMS VII : proceedings of the international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2004-09
- Pub. Year:
- 2004
- Page(from):
- 314
- Page(to):
- 323
- Pages:
- 10
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774222 [1566774225]
- Language:
- English
- Call no.:
- E23400/200409
- Type:
- Conference Proceedings
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