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High-Aspect-Ratio Inductively Coupled Plasma Etching of Bulk Titanium for MEMS Applications

Author(s):
Publication title:
Microfabricated systems and MEMS VII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-09
Pub. Year:
2004
Page(from):
96
Page(to):
107
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774222 [1566774225]
Language:
English
Call no.:
E23400/200409
Type:
Conference Proceedings

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