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Characterization of ultra thin SOI and SSOI substrates: defect and strain analysis Invited

Author(s):
Bedell, S.W.
Hovel, H.
Domenicucci, A.
Fogel, K.
Reznicek, A.
Sadana, D.K.
1 more
Publication title:
Silicon-on-insulator technology and devices XII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-03
Pub. Year:
2005
Page(from):
345
Page(to):
356
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774611 [1566774616]
Language:
English
Call no.:
E23400/200503
Type:
Conference Proceedings

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