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Comparison of FECO Films Plated from an Ammonium-Containing Sulfate Bath and from a SBA-Containing Sulfate Bath

Author(s):
Shao, I.
Romankiw, L.T.
Cooper, E.I.
Bonhote, C.
Lam, J.
Xu, H.
1 more
Publication title:
Electrochemical processes in ULSI and MEMS : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-17
Pub. Year:
2005
Page(from):
420
Page(to):
431
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774727 [1566774721]
Language:
English
Call no.:
E23400/200417
Type:
Conference Proceedings

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