Comparison of FECO Films Plated from an Ammonium-Containing Sulfate Bath and from a SBA-Containing Sulfate Bath
- Author(s):
Shao, I. Romankiw, L.T. Cooper, E.I. Bonhote, C. Lam, J. Xu, H. - Publication title:
- Electrochemical processes in ULSI and MEMS : proceedings of the international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2004-17
- Pub. Year:
- 2005
- Page(from):
- 420
- Page(to):
- 431
- Pages:
- 12
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774727 [1566774721]
- Language:
- English
- Call no.:
- E23400/200417
- Type:
- Conference Proceedings
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