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Uniform Copper Electroplating on Resistive Substrates

Author(s):
Fang, R.
Namiki, K.
Vereecken, P.M.
Kwietniak, K.T.
Baker, B.C.
Ide, K.
Suzuki, H.
Kanda, H.
Mishima, K.
Musaka, K.
Deligianni, H.
6 more
Publication title:
Electrochemical processes in ULSI and MEMS : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-17
Pub. Year:
2005
Page(from):
193
Page(to):
204
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774727 [1566774721]
Language:
English
Call no.:
E23400/200417
Type:
Conference Proceedings

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