Structural Change in Porous Si by Photoillumination during Metal Particle Enhanced Etching

Structural Change in Porous Si by Photoillumination during Metal Particle Enhanced Etching

Author(s):

Publication title:

Pits and Pores : formation, properties, and significance for advanced materials : proceedings of the International Symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2004-19

Pub. Year:

2006

Page(from):

141

Page(to):

146

Pages:

6

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566774741 [1566774748]

Language:

English

Call no.:

E23400/200419

Type:

Conference Proceedings

Details

TDL ID:	ZA00015406
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Pits and Pores ; Meeting of the Electrochemical Society
Conf. info. (Number):	3rd ; 206th
Conf. info. (Venue):	Honolulu, Hawaii, USA
Conf. info. (Date):	2004.10.03-2004.10.08

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