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Ion Shower Doping of Polysilicon Films on Plastic Substrates for Flexible TFT Arrays

Author(s):
Kim, J.
Hong, W.-S.
Lee, S.
Kim, D.-Y.
Jung, J.S.
Kwon, J.-Y.
Noguchi, T.
2 more
Publication title:
Thin Film Transistor Technologies (TFTT VII) : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-15
Pub. Year:
2005
Page(from):
80
Page(to):
86
Pages:
7
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774581 [1566774586]
Language:
English
Call no.:
E23400/200415
Type:
Conference Proceedings

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