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Effect of Stress on Aluminum Induced Crystallization of Magnetron Sputtered Amorphous Silican Thin Film.

Author(s):
Publication title:
Fullerenes and nanotubes, materials for the new chemical frontier : proceedings of the International Symposium on Fullerenes, Nanotubes, and Carbon Nanoclusters
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-12
Pub. Year:
2005
Page(from):
313
Page(to):
320
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774512 [1566774519]
Language:
English
Call no.:
E23400/200412
Type:
Conference Proceedings

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