Measurement of Nitrogen Concentration in CZ-Si below 1014/cm3 by IR Absorption Spectroscopy

Measurement of Nitrogen Concentration in CZ-Si below 1014/cm3 by IR Absorption Spectroscopy

Author(s):

Publication title:

High purity silicon VIII : proceedings of the international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2004-05

Pub. Year:

2004

Page(from):

102

Page(to):

108

Pages:

7

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566774185 [1566774187]

Language:

English

Call no.:

E23400/200405

Type:

Conference Proceedings

Details

TDL ID:	ZA00015395
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on High Purity Silicon ; Meeting of the Electrochemical Society
Conf. info. (Number):	8th ; 206th
Conf. info. (Venue):	Honolulu, Hawaii, USA
Conf. info. (Date):	2004.10.03-2004.10.08

Similar Items:

1 Conference Proceedings Infrared Measurement of Nitrogen Concentration in Cz Si Hashimoto, A., Matsumoto, T., Funao, D., Inoue, N. Electrochemical Society	7 Conference Proceedings Segregation of Nitrogen in Cz Silicon Inoue, N. Electrochemical Society
2 Conference Proceedings Infrared Absorption Measurement of Carbon Concentration in Silicon Crystals N. Inoue, M. Nakatsu, V. Akhmetov Electrochemical Society	8 Conference Proceedings Infrared Absorption Spectroscopy of Complexes in Low Carbon Concentration, Low Dose Irradiated CZ Silicon Crystal N. Inoue, S. Yamazaki, Y. Goto, T. Kushida, T. Sugiyama Electrochemical Society
3 Conference Proceedings Nitrogen Concentration Measurement of CZ Silicon Inoue, N., Fujiyama, N., Yagi, H. SPIE-The International Society for Optical Engineering	9 Conference Proceedings INVITED: MEASUREMENT OF NITROGEN CONTENTRATION IN CZ SILICON Inoue, N., Shingu, K., Masumoto, K. Electrochemical Society
4 Conference Proceedings Nitrogen Concentration Measurement of CZ Silicon Inoue, N., Fujiyama, N., Yagi, H. Electrochemical Society	10 Conference Proceedings INVITED: MEASUREMENT OF NITROGEN CONTENTRATION IN CZ SILICON Inoue, N., Shingu, K., Masumoto, K. Electrochemical Society
5 Conference Proceedings Standardization of Measurement of Nitrogen Concentration in CZ Silicon Crystals N. Inoue, A. Karen, H. Yagi, K. Masumoto, M. Shinomiya, K. Kashima, K. Eifuku, M. Koizumi, T. Takahashi, T. Takenawa, K. … Electrochemical Society	11 Conference Proceedings Standardization of Characterization of Bulk Microdefects and Denuded Zones in Annealed CZ Si R. Takeda, N. Inoue, K. Moriya, K. Kashima, K. Nakashima, M. Kato, S. Kitagawa, T. Ono, H. Urushido, N. Nango, V. … Electrochemical Society
6 Conference Proceedings Estimation of Radiation-Induced Complex Concentration in CZ-Si by IR Absorption Spectroscopy Y. Yonezawa, N. Inoue, Y. Takubo, Y. Goto, T. Sugiyama Electrochemical Society	12 Conference Proceedings Standardization of Nitrogen Analysis in CZ-Si by Charged Particle Activation Analysis Masumoto, K., Nozaki, T., Yagi, H., Minai, Y., Saito, Y., Futatsugawa, S., Inoue, N. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12