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Characteristics of Self-Assembled Ultra-Low-k Porous Silica Films

Author(s):
Oku, Y.
Fujii, N.
Kohmura, K.
Yamada, K.
Hata, N.
Seine, Y.
Ichikawa, R.
Nishiyama, N.
Tanaka, S.
Miyoshi, H.
Oike, S.
Tanaka, H.
Takada, S.
Negoro, C.
Nakano, A.
Rang, H. -K.
Suh, K. -P.
12 more
Publication title:
Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-04
Pub. Year:
2004
Page(from):
331
Page(to):
345
Pages:
15
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774178 [1566774179]
Language:
English
Call no.:
E23400/200404
Type:
Conference Proceedings

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