A 65 nm CMOS Technology Featuring Hybrid-ULK/Copper Interconnects
- Author(s):
Nakai, S. Fukuyama, S. Misawa, N. Miyajima, M. Sugii, T. Watanabe, K. - Publication title:
- Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2004-04
- Pub. Year:
- 2004
- Page(from):
- 65
- Page(to):
- 73
- Pages:
- 9
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774178 [1566774179]
- Language:
- English
- Call no.:
- E23400/200404
- Type:
- Conference Proceedings
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