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On the impact of high-K properties (and defects) on MOSFET el ectrical characteristics (invited paper)

Author(s):
Pantisano, L.
Afanas'ev, V.
Ragnarsson, L-A.
Houssa, M.
Degraeve, R.
Groeseneken, G.
Schram, T.
DeGendt, S.
Heyns, M.
4 more
Publication title:
Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-10
Pub. Year:
2005
Page(from):
144
Page(to):
158
Pages:
15
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774284 [1566774284]
Language:
English
Call no.:
E23400/200510
Type:
Conference Proceedings

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