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Stress Manipulation in CVD grown SiC on Si bv Mono- and submonolaver Ge Drecoverages

Author(s):
Pezoldt, J.
Zgheib, Ch.
Morales, F. M.
Forster, Ch.
Stauden, Th.
Wang, Ch.
Masri, P.
Leycuras, A.
Ferro, G.
Ambacher, O.
5 more
Publication title:
EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-09
Pub. Year:
2005
Page(from):
707
Page(to):
714
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774277 [1566774276]
Language:
English
Call no.:
E23400/200509
Type:
Conference Proceedings

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