Aminoalkoxide groups as monovalent bidentate ligands for the precursors to various metals and metal oxides and the applications of the precursors in MOCVD and ALD

Aminoalkoxide groups as monovalent bidentate ligands for the precursors to various metals and metal oxides and the applications of the precursors in MOCVD and ALD

Author(s):

Kim, C. G.

Publication title:

EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2005-09

Pub. Year:

2005

Page(from):

614

Page(to):

625

Pages:

12

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566774277 [1566774276]

Language:

English

Call no.:

E23400/200509

Type:

Conference Proceedings

Details

TDL ID:	ZA00015392
Series ID:	PA00000028
Conf. info. (Name):	European Conference on Chemical Vapor Deposition - EUROCVD
Conf. info. (Number):	15th
Conf. info. (Venue):	Bochum, Germany
Conf. info. (Date):	2005.09.05-2005.09.09

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