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Plasma enhanced MOCVD of transition metal oxide thin films with a thickness between some hundred and less than one nanometer for optical applications

Author(s):
Hamelmann, F.
Hachmann, W.
Wonisch, A.
Heinzmann, U.
Ivanovo, T.
Gesheva, K.
1 more
Publication title:
EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-09
Pub. Year:
2005
Page(from):
433
Page(to):
440
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774277 [1566774276]
Language:
English
Call no.:
E23400/200509
Type:
Conference Proceedings

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