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Expanding thermal plasma CVD: Experimental studies of the plasma-surface interaction

Author(s):
Van de Sanden, M. C. M.
Creatore, M.
Blauw, M. A.
Hoefiiagels, J. P. M.
Hoex, B.
van den Oever, P. J.
Smets, A. H. M.
Schram, D. C.
Kessels, W. M. M.
4 more
Publication title:
EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-09
Pub. Year:
2005
Page(from):
36
Page(to):
48
Pages:
13
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774277 [1566774276]
Language:
English
Call no.:
E23400/200509
Type:
Conference Proceedings

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